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发明名称
ANNEALING PROCESS AND APPARATUS
摘要
申请公布号
GB9206084(D0)
申请公布日期
1992.05.06
申请号
GB19920006084
申请日期
1992.03.20
申请人
GEC-MARCONI LIMITED
发明人
分类号
B29C71/02;B29K83/00;C08G77/32;C08J7/00;C23C26/00;H01L21/00;H01L21/20;H01L21/324
主分类号
B29C71/02
代理机构
代理人
主权项
地址
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