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发明名称	LASER SUBSTRATE PARTING
摘要
申请公布号	CA893312(A)	申请公布日期	1972.02.15
申请号	CAD893312	申请日期
申请人	WESTERN ELECTRIC COMPANY, INCORPORATED	发明人	DAVID J. OBERHOLZER;CHARLES E. GRAHAM;ROBERT M. LUMLEY
分类号	B23K26/40;B23K9/00;C03B33/09;H01L21/00;H01L21/268;H01L49/02;H05K3/00;(IPC1-7):B23K9/00	主分类号	B23K26/40
代理机构		代理人
主权项
地址

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