| 摘要 |
PURPOSE:To uniformly expose the whole surface of a substrate to light and to transcribe a fine pattern with high accuracy and correctly by a method wherein an orbit of orbiting particles in a vacuum duct of an accumulation ring is vibrated fine in the horizontal direction. CONSTITUTION:An electromagnet 21 exclusively for fine vibration use is installed so as to sandwich a vacuum duct 1 of an storage ring 13. It is driven by using a programmable power supply 22. The electromagnet 21 for fine vibration use is constituted as follows: a coil is wound on an iron core whose cross section is C-shaped; and the vacuum duct 1 is sandwiched between two magnetic poles at its tips from the upper part and the lower part. At this apparatus, a magnetic flux is generated in the vertical direction, and a force in the horizontal direction acts on orbiting particles in the vacuum duct 1. When an alternating electric current is applied by using the programmable power supply 22, it is possible to control the force in the horizontal direction periodically. As a result, an orbit 15 of the orbiting particles is waved in the horizontal direction, and a light-emitting position can be always changed. Consequently, it is possible to prevent an irregularity in the strength of X rays at the transcription technique of a fine pattern by utilizing a synchrotron radiation. |
