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发明名称
METHOD OF BURYING METAL IN PORE
摘要
申请公布号
JPH0417336(A)
申请公布日期
1992.01.22
申请号
JP19900119803
申请日期
1990.05.11
申请人
HITACHI LTD
发明人
NISHITANI EISUKE;TSUJIKU SUSUMU;TOKUNAGA TAKAFUMI;TAMARU TAKESHI
分类号
H01L21/3205;H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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