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发明名称
摘要
申请公布号
JPH0379320(B2)
申请公布日期
1991.12.18
申请号
JP19850045602
申请日期
1985.03.06
申请人
SUMITOMO METAL IND
发明人
KOBAYASHI SUMIO
分类号
C30B15/20;C30B15/14;C30B15/22;C30B15/28;H01L21/18;H01L21/208
主分类号
C30B15/20
代理机构
代理人
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