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发明名称
FORMATION OF WIRING
摘要
申请公布号
JPH03173430(A)
申请公布日期
1991.07.26
申请号
JP19890313626
申请日期
1989.12.01
申请人
MATSUSHITA ELECTRON CORP
发明人
KAKIUCHI TAKAO
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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