DETECTING APPARATUS OF VERY SMALL DISPLACEMENT, PIEZOELECTRIC ACTUATOR HAVING THIS DETECTING APPARATUS AND SCANNING PROBE MICROSCOPE HAVING THIS PIEZOELECTRIC ACTUATOR,申请号JP19850007113-传众专利搜索

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发明名称	DETECTING APPARATUS OF VERY SMALL DISPLACEMENT, PIEZOELECTRIC ACTUATOR HAVING THIS DETECTING APPARATUS AND SCANNING PROBE MICROSCOPE HAVING THIS PIEZOELECTRIC ACTUATOR
摘要
申请公布号	JPH0348102(B2)	申请公布日期	1991.07.23
申请号	JP19850007113	申请日期	1985.01.18
申请人	KAMATA YOSHUKI	发明人	KAMATA YOSHUKI
分类号	B65H3/52;B65H3/04;B65H3/06	主分类号	B65H3/52
代理机构		代理人
主权项
地址

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