| 摘要 |
PURPOSE:To use a light element thin film window and improve pressure resistance performance and to detect X rays with high sensitivity by decreasing the thickness of the X-ray detection window gradually from the outer peripheral part supported on a tube in a vacuum state to the center part of the window. CONSTITUTION:The detector part of an energy dispersion type X-ray spectroscope is arranged nearby a sample 9 between magnetic pole pieces 8 of an objective while penetrating the lens barrel 7 of an electron microscope. Then the lens barrel 7 and a protection barrel 4 are connected by a bellows 5 to attain vacuum sealing and the vacuum in the lens barrel 7 is maintained. The inside of the spectroscope is arranged hermetically in the protection barrel 4 in a vacuum state and a semiconductor detector 1 which is cooled by a cooling tank 2 at all times detects X rays transmitted through a beryllium window 10 from the sample. This window 10 is formed decreasing gradually in thickness from the window outer peripheral part to the detection center part according to the phenomenon that stress applied to the thin film window with uniform thickness decreases toward the center part. Therefore, even if the center part is thin, the pressure resistance performance is good and higher sensitivity is obtained at the center part.
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