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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03123059(A)
申请公布日期
1991.05.24
申请号
JP19890260464
申请日期
1989.10.04
申请人
NEC KYUSHU LTD
发明人
KAMITAKA TOSHIMITSU
分类号
H01L21/3213;H01L21/3205;H01L21/768;H01L23/522
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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