摘要 |
The disclosure relates to a radiation heat shield which is formed of graphite which covers the open end of the crucible of a furnace for forming single crystals of silicon by the Czochralski method. The graphite preferably has a silicon carbide coating thereon. The heat shield is preferably formed in plural segments with a counterweight at one end of each of the segments whereby, upon raising of the crucible, the segments and associated counterweight rotate about a pivot to expose the top of the crucible.
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