发明名称 Radiation heat shield for silicon melt-in manufacturing of single crystal silicon
摘要 The disclosure relates to a radiation heat shield which is formed of graphite which covers the open end of the crucible of a furnace for forming single crystals of silicon by the Czochralski method. The graphite preferably has a silicon carbide coating thereon. The heat shield is preferably formed in plural segments with a counterweight at one end of each of the segments whereby, upon raising of the crucible, the segments and associated counterweight rotate about a pivot to expose the top of the crucible.
申请公布号 US5004519(A) 申请公布日期 1991.04.02
申请号 US19880244623 申请日期 1988.09.12
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 HARIRI, FAROUK A.
分类号 C30B15/14 主分类号 C30B15/14
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