| 摘要 |
<p>PURPOSE:To obtain a vertical magnetic recording medium for super high density magnetic record suitable for practical use and mass production by a method wherein an easy magnetizing layer is formed by a Co-Mo-V film with specific ratio in the vertical direction. CONSTITUTION:A vertical magnetizing film is composed of Co of 75-90wt%, Mo of 15wt% or less, and V as residual and an inevitably accompanying impurity. In this Co-V-Mo film composition, the half-value width of an X-ray reflective locking curve from 002 plane which is the most important parameter as a vertical recording medium is 5 deg. or less. This value is equal to that of Co-Cr film. Coersive force can be controlled to the value of 300-600Oe within the range of the upper limit of 600Oe or less by adjusting the adding amount of Mo. Furthermore, the increasing rate of coersive force accompanied by a rise in substrate temperature can be controlled to 10Oe/10 degress or less, or 1/3 or less of Co-Cr film temperature. In the case of continuous film formation, a change in coercive force of substrate temperature caused by radiant heat from a target can be further lowered than that for Co-Cr film.</p> |
