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发明名称
PLASMA TREATMENT APPARATUS
摘要
申请公布号
JPH01283362(A)
申请公布日期
1989.11.14
申请号
JP19880111588
申请日期
1988.05.10
申请人
KANEBO LTD
发明人
KONDO YOSHIKAZU;TSUDA YUKIO
分类号
C08J7/00;C23C14/22;C23C14/24;C23C16/50;C23C16/54;C23F4/00
主分类号
C08J7/00
代理机构
代理人
主权项
地址
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