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发明名称
MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号
JPH01276714(A)
申请公布日期
1989.11.07
申请号
JP19880104017
申请日期
1988.04.28
申请人
FUJITSU LTD
发明人
HASEGAWA MICHIHIKO
分类号
C30B29/06;H01L21/20;H01L21/263
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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