发明名称 |
LIGHT DETECTOR ARRAY WITH INDIVIDUAL COLD SHIELDS INTEGRATED INTO A SUBSTRATE, AND METHOD FOR ITS PRODUCTION |
摘要 |
The invention relates to a matrix device for the detection of light radiation with individual cold screens integrated into a substrate and to its production process. This device comprises detectors arranged in matrix-like manner and defined in a detection material, a substrate which is transparent to the radiation to be detected and on which is epitaxied the detection material and provided in its upper part with blind holes distributed in matrix-like manner, each hole being positioned facing a detector, a layer of anti-reflecting transparent material covering the bottom of the holes and a layer of a material absorbing the radiation covering the upper face of the substrate and the walls of the holes. The invention more particularly applies to an infrared imaging system. |
申请公布号 |
EP0191682(B1) |
申请公布日期 |
1989.10.11 |
申请号 |
EP19860400178 |
申请日期 |
1986.01.29 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
AMINGUAL, DANIEL;FELIX, PIERRE |
分类号 |
H04N5/33;G01J1/02;H01L27/144;H01L27/146;H01L31/0216 |
主分类号 |
H04N5/33 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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