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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH01230770(A)
申请公布日期
1989.09.14
申请号
JP19880055378
申请日期
1988.03.09
申请人
TOKUDA SEISAKUSHO LTD
发明人
ANADA TAKAHIRO
分类号
C23C14/34;C23C14/35;C23F4/00;H01L21/302;H01L21/3065;H01L21/31
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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