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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01218028(A)
申请公布日期
1989.08.31
申请号
JP19880044974
申请日期
1988.02.26
申请人
SEIKO EPSON CORP
发明人
YUDASAKA KAZUO;MIYASAKA TSUGUMITSU
分类号
H01L21/31;G02F1/1333;H01L27/12
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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