发明名称 Method of producing filaments
摘要 A method of producing filaments of sub-micron cross-sectional dimensions including the steps of obtaining a substrate having a base and a delineating layer on the base and a step in a surface of the delineating layer, providing a layer of a material from which the filament is to be formed on the surface which replicates the step in the surface, anisotropically etching the layer of filament material in the direction of the surface so as to leave a filament of the material adjacent the step, and removing the delineating layer to wholly or partially separate the filament from the substrate.
申请公布号 US4849069(A) 申请公布日期 1989.07.18
申请号 US19870131059 申请日期 1987.12.09
申请人 SPECTROL RELIANCE LIMITED 发明人 EVANS, ALAN G. R.;FAROOQUI, MOHAMMED M.
分类号 C23F1/02;G03F7/00;H01L21/033 主分类号 C23F1/02
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