| 摘要 |
PURPOSE:To make possible a continuous and automatic measurement using a probing device for a longer time and to contrive the improvement of productivity by a method wherein carriers provided in a stocker, in which a plurality of the carriers are housed, are installed at a previously set carrier installing position. CONSTITUTION:Each carrier placing shelf 6 is descended at a point of time when the measurement of wafers 2 on the lowest stage of the carrier placing shelf 6 ends and the central stage of the carrier placing shelf 6 is installed at a height position where wafers 2 can be carried-out and carried-in by a vacuum pincette 10 located at a previously set height position. Here, the measurement of wafers 2 housed in wafer carriers 5 placed on this central stage of the shelf 6 is again repeated, each shelf 6 is again descended at a point of time when the measurement of the wafers 2 on the central stage of the shelf 6 ends, the upper stage of the cassette placing shelf 6 is installed at the prescribed position and the measurement of wafers 2 is executed. By enabling a multitude of the wafer carriers 5 to house in a probing devide in such a way, a long time continuous measurement in the probing device becomes possible. |
