APPARATUS AND METHOD FOR ALIGNING BY EXCIMER LASER CONTRACTION AND PROJECTION,申请号JP19870269657-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR ALIGNING BY EXCIMER LASER CONTRACTION AND PROJECTION
摘要
申请公布号	JPH01111321(A)	申请公布日期	1989.04.28
申请号	JP19870269657	申请日期	1987.10.26
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	NAKAGAWA HIDEO;ENDO MASATAKA;SASAKO MASARU;OGAWA KAZUFUMI
分类号	G03F7/20;G03F7/22;H01L21/027;H01L21/30;H01S3/10;H01S3/101	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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