REACTIVE ION ETCHING OF III-V GROUP MATERIAL,申请号JP19880122158-传众专利搜索

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发明名称	REACTIVE ION ETCHING OF III-V GROUP MATERIAL
摘要
申请公布号	JPS6479389(A)	申请公布日期	1989.03.24
申请号	JP19880122158	申请日期	1988.05.20
申请人	ROA ANRI;KUROODO BUOODORI	发明人	ROA ANRI;KUROODO BUOODORI
分类号	C23F4/00;H01L21/306;H01L33/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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