| 摘要 |
PURPOSE:To prevent the deterioration of transfer efficiency by arranging a region where a channel width for transfer becomes narrow in a transfer electrode and by causing a place where the channel width becomes narrow to be formed within a dimension that is shorter than the channel width for transfer which becomes narrow from an end part of the transfer electrode on this side stage of the transfer electrode. CONSTITUTION:A flow of a signal charge from a transfer electrode 12a to the transfer electrode 12b is transferred to a center part along the vertical direction at a channel region 18 having a wide entrance side of the transfer electrode 12b as shown at a peripheral part by a directed line Y. When a distance E that makes a transfer channel narrow is shorter than a width D of a narrow channel region 19, the signal charge from this side stage flows as shown by the directed line Y at a wide place 18 and the region 18 having the wide channel width in the transfer electrode 12b effectively acts as channel width E. When the dimension of the width E is shorter than the narrow channel width D, a channel electric potential in the transfer electrode 12b located at the region 19 is higher than that located at the region 18. Then the signal charge smoothly moves in the direction of an outlet.
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