发明名称 CONTROL METHOD FOR POSITIONING OF MOBILE BODY
摘要 PURPOSE:To realize positioning in which no vibration is generated, by setting a targeted position pattern so that the change of the acceleration of a mobile body becomes a smooth pattern without a discontinuous point, and performing the position control of the mobile body so as to follow the pattern. CONSTITUTION:A position feedback loop 11 calculates a difference between the present location c(t) of the mobile body for a targeted position P(t) as a position deviation e(t) at a position deviation arithmetic part 13, and supplies it to a proportional element 14 and an integral element 15. A speed feedback loop 12 sets the present speed v(t) with an element 16 as the present speed output d3. Those deviations are calculated at data arithmetic parts 17 and 18, and the speed v(t) is calculated through a gain element 19 and blocks 20 and 21, and the present location c(t) at a block 22. The targeted position P(t) is supplied to the arithmetic part 13 by varying it along a targeted position pattern PT0. In such a way, the mobile body is controlled so as to follow the pattern PT0, and is moved without generating the vibration, and also, it is positioned.
申请公布号 JPS63174107(A) 申请公布日期 1988.07.18
申请号 JP19870006338 申请日期 1987.01.14
申请人 OMRON TATEISI ELECTRONICS CO 发明人 HINOTO OKIFUMI;KOSHIBA YOSHIHITO;MURAO HIROSHI
分类号 G05D3/12;H01L21/67;H01L21/68 主分类号 G05D3/12
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