| 摘要 |
PURPOSE:To suppress the thermal expansion of a mask by providing a cooling tube in a mask plate. CONSTITUTION:A mask plate 1 and a cooling tube 2a buried in the plate 1 are provided. The internal disposition of the (one or more) tube 2a may be disposed in any direction if there are an inlet and an outlet. In this case, since a refraction does not become a problem if an exposure light source is an X-ray or an alpha-ray source, the thermal expansion of the plate 1 can be suppressed by feeding cooling gas or water through the tube 2a. |
