| 摘要 |
PURPOSE:To suppress the roughing of crystal on a focusing plane even in case of longtime repetitive operations and to enable the suppression of a decrease in the amount of X-ray radiation by composing a target of an alloy of molybdenum and minimal titanium. CONSTITUTION:A rotary anode target 15 is composed of an alloy of Mo as a main element and minimal titanium or moreover containing minimal carbon as deoxidizer. The content of Ti is made in the range of 0.3 wt% to 4 wt%, and the content of C is made in the range of 50 ppm to 400 ppm (for the amount remaining on a target). More preferably, the content of Ti and that of C are made in the range of 0.6 wt% to 2.0 wt% and in the range of 50 ppm to 250 ppm, respectively. Because C functions as a deoxidizer, it is not indispensable, however, it disperses to remain between Mo and Ti, which compose the target, and it partially remains in the form of TiC by vacuum sintering, so that the roughing of crystal in the target metal can be suppressed.
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