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发明名称
RAMAN SPECTROMETRY FOR SURFACE OF SEMICONDUCTOR
摘要
申请公布号
JPS6333646(A)
申请公布日期
1988.02.13
申请号
JP19860176922
申请日期
1986.07.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KUBO MINORU;OGURA MOTOTSUGU
分类号
G01N21/65;H01L21/66
主分类号
G01N21/65
代理机构
代理人
主权项
地址
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