| 摘要 |
PURPOSE:To carry out the changeover control of gas velocities at the time of supply and exhaust of gases by arranging adjusting valves and a one-way valve on one side of three or more connecting paths communicating gas flow passages, and an open/close valve on the other side. CONSTITUTION:On a valve body 2 two gas flow passages 3 and 4 are provided. An upper side gas flow passage 3, a lower side gas flow passage 4, and a one- way valve 10 are respectively communicated by three connecting paths 5 through 7 arranged horizontally at a given space. In the lower side gas flow passage 4, adjusting valves 8, 9 are provided so as to be opposite to the lower side communicating ports 6a, 7a of respective connecting paths 6, 7, and on the other hand, in the upper side gas flow passage 3, an open/close valve 13 which is opposite to the upper side communicating part 6b of the connecting path 6 positioned at center and further opens or closes the upper side communicating port 6b is provided.
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