| 摘要 |
PURPOSE:To accurately position color filter elements for picture elements of solid state image pickup element by using color position marks formed simultaneously upon forming of the color filter elements to enhance the positioning accuracy of color positioning marks on the elements. CONSTITUTION:Color filter elements are formed of an optical black pattern 23 of thin chromium film formed on the back surface of a filter glass substrate 22, a resin layer 31 formed thereon, and a photosensitive gelatine film formed thereon by photolithography, dyed yellow color filter element 28, a resin layer 32, a magenta color filter element 25, a resin layer 23, a cyan color filter element 29, and a resin layer 24 are sequentially superposed in a laminar state. A color positioning mark 26 is formed simultaneously upon forming of the magenta color filter element 28 by photolithography and dying. The positioning accuracy of the mark 26 to the element 28 is determined by the mask accuracy in the photolithography to be normally within + or -0.1mum. |
