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经营范围
发明名称
WAFER PROBER
摘要
申请公布号
JPS6245139(A)
申请公布日期
1987.02.27
申请号
JP19850184111
申请日期
1985.08.23
申请人
HITACHI LTD
发明人
SHIDA NAOTO;MATSUMOTO HIROMITSU;TAKEUCHI TAKASHI
分类号
H01L21/66;G01R1/04
主分类号
H01L21/66
代理机构
代理人
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