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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPS6245018(A)
申请公布日期
1987.02.27
申请号
JP19850183076
申请日期
1985.08.22
申请人
ANELVA CORP
发明人
SEKIGUCHI ATSUSHI;ICHIMURA KENICHI
分类号
H01L21/205;H01L21/263;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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