| 摘要 |
PURPOSE:To enhance the machining efficiency by performing location and machining of each work to be processed with different stations simultaneously, and thereby enabling continuous machining operation. CONSTITUTION:A prop 14 with square profile is supported on a base 12 in such a way as rotatable at 180 steps unidirectionally. A plurality of table assemblies 40, 41 are placed on this prop 14. These shall have identical construction, and a main table 42 is moved along Y-axis by a pulse motor provided within said prop 14. A sub-table 44 is rotated along X-axis upon the main table 42 while a chuck table 46 upon the sub-table. A processing mechanism 16 is fixed on the base 12 round the prop 14, and a locating means 78 and a cutting means 79 are provided. While the table assembly 40 is facing the locating means 78, the other assembly 41 is situated at the cutting means 79. This cutting means 79 cuts a wafer placed on the chuck table 46. This arrangement enables continuous cutting. |
