发明名称 WIRING PROCESS SYSTEM
摘要 PURPOSE:To contrive a reduction in the manhour and the improvement of the reliability of the wiring by a method wherein a data memory means, an unwired region search means, a lineal width expanding means and a control means are provided and an area compensation is automatically performed to circuit wiring data needing the area compensation. CONSTITUTION:Circuit wiring data 2c, LSI substrate data 20 and data on area compensation to perform to circuit wiring data needing the area compensation are stored in a data memory means 1. A control means 4 searches an circuit wiring data 2c needing an area compensation in the data memory means 1. An unwired region search means 2 searches on the wiring data 2c and finds an unwiried region adjacent to the wiring 2c on reference to the substrate data 20 and the wiring data of other circuits. A lineal width expanding means 3 expands the lineal width in the unwired region found and performs an area compensation. The expansion of lineal width is performed in such a way as not to come into contact to forbidden regions 2d and 2e on the substrate and the wiring of other circuits. Moreover, parts of the lineal data in the wiring data are modified on the basis of the result of the expansion of lineal width. The control means 4 performs a control of wiring process in such a way to process about all circuit wiring data to need an area compensation.
申请公布号 JPS61158161(A) 申请公布日期 1986.07.17
申请号 JP19840278946 申请日期 1984.12.28
申请人 NEC CORP 发明人 NOMURA MINORU
分类号 H01L21/768;G06F17/50;H01L21/82;H01L23/522 主分类号 H01L21/768
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