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发明名称	ION MICRO-BEAM APPARATUS
摘要
申请公布号	JPS6180744(A)	申请公布日期	1986.04.24
申请号	JP19840200424	申请日期	1984.09.27
申请人	HITACHI LTD	发明人	KAWANAMI YOSHIMI;ISHITANI TORU;UMEMURA KAORU;TAMURA HIFUMI
分类号	H01J37/09;H01J37/04;H01J37/147;H01J37/252;H01J37/30;H01L21/027;H01L21/265	主分类号	H01J37/09
代理机构		代理人
主权项
地址

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