| 摘要 |
A ceramic heater of the present invention comprises a sintered heating element bonded to a supporting substrate or a sintered element alone. A sintered body comprises the heating element is mainly composed of silicon nitride with such sintering agents as yttrium oxide to be superior in strength, thermal shock resistance and thermal resistance. The sintered body also includes 10-80 mol % of titanium carbide, titanium nitride or a mixture thereof which are electrically conductive ceramics so that the specific electrical resistance can be controlled. A method for producing a ceramic heater of the present invention consists of the first process in which a powdery mixture is prepared by mixing powders which are made to have structures of a solid solution by previous calcination of silicon nitride and a sintering agent and powders of conductive ceramics which comprise either or both of titanium carbide and titanium nitride, and the second process in which such powdery mixture is formed and sintered by heating. |
