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发明名称
HANDOTAISHUSEKIKAIRONO SEIZOHOHO
摘要
申请公布号
JPS5112770(A)
申请公布日期
1976.01.31
申请号
JP19740083997
申请日期
1974.07.22
申请人
SUWA SEIKOSHA KK
发明人
AIZAWA HIDESHI
分类号
H01L21/60;H01L21/28;H01L21/44
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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