| 摘要 |
PURPOSE:To make the effective use of gaseous raw materials for an Si photoreceptor layer and to make a device simple in construction and smaller in size by connecting plural reaction chambers in series. CONSTITUTION:The discharging part 9 for gaseous raw material in the 1st reaction chamber 1 and the introducing part 10 for gaseous raw material in the 2nd reaction chamber 2 are connected to each other through the 1st replenishing part 6 for gaseous raw material. The discharging part 11 for gaseous raw material in the chamber 2 and the introducing part 12 for gaseous raw material in the 3rd reaction chamber 3 are connected to each other through the 2nd replenishing part 7 for gaseous raw material. The introducing part 8 of the chamber 1 is connected to an introducing line 4 for gaseous raw material and the discharging part 13 of the chamber 3 is connected to a discharging line 5 for gaseous raw material. The part 6 and the part 7 are connected respectively to replenishing lines 14, 15 for gaseous raw material. |
