| 摘要 |
PURPOSE:To reduce power consumption and to enhance productivity and responsiveness to change of partial pressure of oxygen, by forming three elements of a metallic oxide semiconductor for detecting oxygen concn., a temp. compensation resistor, and a heating conductor on an insulating base into layers to unite them into one laminate structure. CONSTITUTION:A sensor element 12 comprises an insulating base 13, a heating conductor film 14 sealed in between said base 13, wire conductors 15a, 15b, 15c, and 15d, a metallic oxide semiconductor film 16 for detecting oxygen concn. and an electrode 17 formed on one side of the base 13, a temp. compensation resistor (thermistor) film 18 and an electrode 19 formed on the other side of the base 13. An oxygen concn. sensor element 12 united into a laminate structure is obtained by calcining a ceramic sheet having three elements of the heating conductor 14, the semiconductor 16, and the resistor 18 printed on it. |
