| 摘要 |
PURPOSE:To ease the manufacture of a secondary ion mass analyzer by simplifying its construction in such a way that it is able to analize simultaneously positive and negative ions generated from a sample by an impact of ions against the sample by using a single tetraelectrode. CONSTITUTION:A positive secondary ion 3, which is discharged by striking a primary ion 2 against a sample 1, is converged by an Einzel lens 4, and led to a tetraelectrode 6 through an energy filter 5 of a sectorial static field and, through a grid 8 of a sectorial static field 7, detected by a detector 10. On the other hand, a negative ion 11 is led to a tetraelectrode 6 through a lens 12 and the sectorial static field 7, passed to the sectorial static field 5, and through its grid 13 finally detected by a detector 15. Thus, a simultaneous mass analysis of positive and negative ions can be performed by the use of the single tetraelectrode 6 and the reduction of the manufacturing cost of the analyzer is attained due to its so-simplified construction. |
