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发明名称
APPARATUS FOR ELECTRONNBEAM IRRADIATION
摘要
申请公布号
JPS55165628(A)
申请公布日期
1980.12.24
申请号
JP19790072976
申请日期
1979.06.12
申请人
FUJITSU LTD
发明人
IIJIMA TSUNEO
分类号
H01J37/04;G01Q30/02;G01Q30/16;G01Q30/18;H01J37/09;H01L21/027;H01L21/30
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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