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发明名称
MANUFACTURING OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5538019(A)
申请公布日期
1980.03.17
申请号
JP19780110506
申请日期
1978.09.08
申请人
FUJITSU LTD
发明人
SHIRAI KAZUNARI
分类号
H01L29/78;H01L21/28
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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