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发明名称
DEVICE FOR DETERMINING SEMICONDUCTOR STRUCTURE TEMPERATURE
摘要
申请公布号
SU586407(A1)
申请公布日期
1977.12.30
申请号
SU19762315038
申请日期
1976.01.12
申请人
LE POLT I IM.M.M.KALININA
发明人
RODNYJ PETR A,SU;YAKERSON LEV S,SU
分类号
H01L21/66;G01R31/26;(IPC1-7):G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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