| 摘要 |
<p>PURPOSE:To eliminate restriction in direction of a wafer housing tool and restriction in the surrounding space and enable a most-recent high-performance device to be introduced into an automation line by newly adding a collar for carrying a robot in a direction which is at right angle to the direction where a conventional collar for carrying a robot of the wafer housing jig is arranged. CONSTITUTION:A number of retaining grooves 9 for aligning and retaining a semiconductor wafer are formed opposingly each other at the inner surface of opposing side plates 3. There are collars 2, 2' in the direction of the opposing side plates 3 of an edge plate 4 at the upper side, and there are collars 10, 10' in the direction which is at right angle to it. The gap and shape of the collars 10, 10' are the same as those of the collars 2, 2'. Thus, the direction for moving a clamp nib 6 of a robot so that a wafer housing tool 1 is retained is as indicated by an arrow 11 and a wrist 8 of a robot can be placed in the direction of the opposing side plate 3. Also, by using the same clamp nib, the conventional wrist placement is possible and the wrist 8 of a robot can be placed in all four directions of the wafer housing jig.</p> |
