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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENTS
摘要
申请公布号
GB1597596(A)
申请公布日期
1981.09.09
申请号
GB19790030664
申请日期
1978.05.31
申请人
FUNKWERK ERFURT VEB
发明人
分类号
H01J37/30;H01J37/317;(IPC1-7):H01J27/00
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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