| 摘要 |
A process is disclosed for coating objects with hard materials according to a PVD (physical vapour deposition) process, in which the object to be coated is pre-heated. According to this process, the object and/or its surface are heated by exposure to radiation before the surface is coated. In a preferred embodiment of the process, a heating element is used as radiation source, at a high partial pressure of the reaction gas, preferably in the 10<-3> to 1 mbar range. A device that can be used as a radiation source to implement the process is formed by a heating element (1) provided with an electrically heatable resistance wire axially arranged in the hollow cylinder. Between the heating element (1) and the inner wall (10) of the reaction chamber (11) a reflector surface (12) is preferably located. The objects (16) obtained by this process are distinguished by improved mechanical properties, as their surfaces coated with hard substances present only, if at all, a small quantity of so-called droplets. |
