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发明名称
EPITAXIAL WAFER
摘要
申请公布号
JPH0371644(A)
申请公布日期
1991.03.27
申请号
JP19890208150
申请日期
1989.08.10
申请人
SANYO ELECTRIC CO LTD
发明人
SAWADA MINORU
分类号
H01L21/20;H01L21/203;H01L21/338;H01L29/778;H01L29/812
主分类号
H01L21/20
代理机构
代理人
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地址
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