Air bearing assembly

摘要

A stage device comprising a base, a stage positioned adjacent to the base and movable relative to the base, and a bearing assembly. The bearing assembly includes at least one fluid bearing interposed between the base and the stage for supporting the stage on the base and movable relative to the base and stage. A method of the present invention is for positioning a stage within a lithography system and comprises placing the fluid bearing between the stage and the base and moving the stage and the bearing in a first direction.