| 摘要 |
A photonic integrated device having a substrate layer, epitaxial layers formed on said substrate layer and a guiding layer formed by one of the epitaxial layers. An optical waveguide is formed within the guiding layer. In the waveguide are a splitter ( 4 ) having at least two outputs, each output being transmitted to a Mach-Zehnder modulator ( 6, 8 ), the phase of the output of at least one modulator being shiftable, the signals being recombined to provide an optical phase shift key (PSK) output ( 14 ) wherein a trench is etched into the substrate layer between each pair of modulators to isolate the modulators from one another.
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