METHOD FOR HOUSING LARGE-SIZE PELLICLE

摘要

PROBLEM TO BE SOLVED: To securely hold and fix a pellicle in a stable state to a tray via a pin and a pressing margin by an extremely easy work by inserting the pin to a pin hole in the pressing margin of the large size pellicle when the pellicle is mounted on the tray.

SOLUTION: The outside of the outer edge of a protective film 5 for a large size pellicle A is provided with a protruding press margin 5a having a specified dimension, and the press margin 5a is provided with a pin hole 9. A pin 10 is made to stand on the surface of the tray 6 of the pellicle housing case B in which the large size pellicle A can be mounted. When the pellicle A is to be mounted on the tray 6, the pin 10 is inserted to the pin hole 9 of the press margin 5a to fix the pellicle A to the tray 6 and to house the large size pellicle A in the housing case B.

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