| 摘要 |
The present invention obtains a smooth microlens surface and maintains the spacing between adjacent microlenses, and improves the light collection efficiency of the microlenses. An image sensor in which a color separation filter and microlenses are layered, in the stated order, on a photoelectric conversion element formed on a semiconductor substrate. The microlenses have a two-layer structure comprising, along the layering direction, a microlens lower layer on the color separation filter side and a microlens upper layer formed on the microlens lower layer. The microlens lower layer has a columnar or a frustum shape and the microlens upper layer has a hemispherical shape. The microlens upper layer preferably has a refractive index equal to or higher than the refractive index of the microlens lower layer. |
