| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easily introduceable apparatus for forming an ion screening space. <P>SOLUTION: A first ionic wind unit is used to cause a first ion curtain 34 with width direction substantially vertical to travel in a first, substantially horizontal direction, and a second ionic wind unit is used to cause a second ion curtain 36 with width direction substantially vertical to travel in a second, substantially horizontal direction that is at an angle to the first substantially horizontal direction. Further, the first and second ionic wind units are secured at one corner of a predetermined space by a retaining frame. <P>COPYRIGHT: (C)2007,JPO&INPIT |
