| 摘要 |
PURPOSE:To mount a chip on a substrate correctly by providing a moving means which moves a camera for observing the substrate and the substrate in an XY direction relatively, in order to position this camera and substrate at the upper part of the recognition mark formed on the substrate, based on the signal of a 2nd sensor. CONSTITUTION:A 1st sensor 11 and 2nd sensor 12 detecting the substrate 2 transferred to a conveyor 1 are provided. When this 1st sensor 11 detects the substrate 2, it is stopped with a motor 13 driving the conveyor 1 being stopped. Then the stop position of the substrate 2 is detected by the 2nd sensor 12. Then a camera 5 is moved to the upper part of the substrate 2, based on the detection signal of this 2nd sensor 12, the substrate 2 is observed by this camera 5 and the stop position error in the XY direction of the substrate 2 is detected. Then on the substrate 2 a tip 3 is mounted by a transfer head 7, while correcting the dislocation thereof. |
